Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density
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Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density by Russell, T. J.

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Published by U.S. Dept. of Commerce, National Bureau of Standards, National Technical Information Service, distributor in Washington, DC, [Springfield, VA .
Written in English

Subjects:

  • Microelectronics.,
  • Oxides -- Thermal properties.,
  • Electric charge and distribution.

Book details:

Edition Notes

StatementT.J. Russell ; prepared for Air Force Wright Aeronautical Laboratories and Naval Air Systems Command.
SeriesNBSIR -- 81-2413., NBSIR -- 2413.
ContributionsAir Force Wright Aeronautical Laboratories., United States. Naval Air Systems Command., United States. National Bureau of Standards.
The Physical Object
Paginationiv, 36 p. :
Number of Pages36
ID Numbers
Open LibraryOL17656048M

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